| Model | MC(M)-DN800 | MC(M)-DN810 | MC(M)-DN801 | MC(M)-DN811 | MC(M)-DN802/03 | MC(M)-DN812/13 | ||
| Performance | ||||||||
| Full Scale Range（N2 Eqv） | 2-5000SCCM | 5SLM-50SLM | 02:30SLM-300SLM 03:200SLM-500SLM |
02:30SLM-300SLM 03:200SLM-500SLM |
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| Control Range | Single Gas: 2-100% F.S.① MGMR: 5-100% F.S. | |||||||
| Response Time | ≤ 1.0sec to within ±1% F.S. | ≤ 3.0sec to within ±2% F.S. | ||||||
| Accuracy | ≤ ±1% S.P.(25%-100% of Full Scale) ≤ ±0.25% F.S.(2%-25% of Full Scale) |
≤ ±2% S.P.(25%-100% of Full Scale) ≤ ±0.5% F.S.(2%-25% of Full Scale) |
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| Linearity | ≤ ±0.5% F.S. | ≤ ±1% F.S. | ||||||
| Repeatability | ≤ ±0.2% F.S. | |||||||
| Operating Differential Pressure | 0.05-0.28 Mpa② | 0.07-0.28 Mpa(5SLM-23SLM) 0.14-0.28 Mpa(23SLM-50SLM) |
0.15-0.30 Mpa(30SLM-200SLM) 0.20-0.30 Mpa(200SLM-500SLM) |
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| Maximum Operating Pressure | 0.48 Mpa | |||||||
| Proof Pressure | Max 1.03 Mpa | |||||||
| Leak Integrity | Viton: Max 1x10-7Pa.m3/sec(He) Metal:Max 1x10-11Pa.m3/sec(He) | |||||||
| Operation Temperature | 5-45 DegC | |||||||
| Mechanical Parts | ||||||||
| Control Valve | Normally Closed（MFC） | |||||||
| Seal | Viton | Metal | Viton | Metal | Viton | Metal | ||
| Material | Stainless Steel 316L,PTFE | |||||||
| Fitting | 1/4" VCR or 1/4" Swagelok Compatible 3/8" VCR or 3/8" Swagelok Compatible 1/2" VCR or 1/2" Swagelok Compatible |
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| Mounting Posture | Any Position | |||||||
| Weight | 0.9kg | 1.0kg | 0.9kg | 1.2kg | 2.2kg | 2.3kg | ||
| Surface Finish | ≤5RA | TC,≤5RA | ≤5RA | TC,≤5RA | ≤5RA | TC,≤5RA | ||
| Electrical Configuration | ||||||||
| Electrical Signal | DeviceNet： 5-Pin M12 *1 RJ11 *1 |
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| Power Supply | +15VDC ±2% at 50mA -15VDC ±2% at 250mA maximum |
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| ﹢24VDC±15% at 240mA maximum | ||||||||
| Power Consumption | 3.5W | 4.5W | ||||||
| Option | ||||||||
| Multi-Gas &Multi-Range | N2 Eqv Full-scale Flow: Multi-0:10SCCM; Multi-1:30SCCM; Multi-2:100SCCM; Multi-3:300SCCM; Multi-4:1000SCCM; Multi-5:3SLM; Multi-6:5SLM; Multi-7:10SLM; Multi-8:30SLM; Multi-9:50SLM |
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