| Model | MC(M)-DG900 | MC(M)-DG910 | MC(M)-DG901 | MC(M)-DG911 | MC(M)-DG902/03 | MC(M)-AN612/13 | ||
| Performance | ||||||||
| Full Scale Range（N2 Eqv） | 2-5000SCCM | 5SLM-50SLM | 02:30SLM-300SLM 03:200SLM-500SLM |
02:30SLM-300SLM 03:200SLM-500SLM |
||||
| Control Range | Single Gas: 2-100% F.S.① MGMR: 5-100% F.S. | |||||||
| Response Time | ≤ 1.0sec to within ±1% F.S. | ≤ 3.0sec to within ±2% F.S. | ||||||
| Accuracy | ≤ ±1% S.P.(25%-100% of Full Scale) ≤ ±0.25% F.S.(2%-25% of Full Scale) |
≤ ±2% S.P.(25%-100% of Full Scale) ≤ ±0.5% F.S.(2%-25% of Full Scale)） |
||||||
| Linearity | ≤ ±0.5% F.S. | ≤ ±1% F.S. | ||||||
| Repeatability | ≤ ±0.2% F.S. | |||||||
| Operating Differential Pressure | 0.05-0.28 Mpa② | 0.07-0.28 Mpa(5SLM-23SLM) 0.14-0.28 Mpa(23SLM-50SLM) |
0.15-0.30 Mpa(30SLM-200SLM) 0.20-0.30 Mpa(200SLM-500SLM) |
|||||
| Maximum Operating Pressure | 0.48 Mpa | |||||||
| Proof Pressure | Max 1.03 Mpa | |||||||
| Leak Integrity | Viton: Max 1x10-7Pa.m3/sec(He) Metal:Max 1x10-11Pa.m3/sec(He) | |||||||
| Operation Temperature | 5-45 DegC | |||||||
| Mechanical Parts | ||||||||
| Control Valve | Normally Closed（MFC） | |||||||
| Seal | Viton | Metal | Viton | Metal | Viton | Metal | ||
| Material | Stainless Steel 316L,PTFE | |||||||
| Fitting | 1/4" VCR or 1/4" Swagelok Compatible 3/8" VCR or 3/8" Swagelok Compatible 1/2" VCR or 1/2" Swagelok Compatible |
|||||||
| Mounting Posture | Any Position | |||||||
| Weight | 0.9kg | 1.0kg | 0.9kg | 1.2kg | 2.2kg | 2.3kg | ||
| Surface Finish | ≤5RA | TC,≤5RA | ≤5RA | TC,≤5RA | ≤5RA | TC,≤5RA | ||
| Electrical Configuration | ||||||||
| Electrical Signal | 0-5VDC: 9P-DSub *1 RS485: RJ11 *2 |
|||||||
| Power Supply | +15VDC ±2% at 50mA -15VDC ±2% at 250mA maximum |
|||||||
| ﹢24VDC±15% at 240mA maximum | ||||||||
| Power Consumption | 3.5W | 4.5W | ||||||
| Option | ||||||||
| Integrated Control Panel | With OLED screen, Flow rate reading, controlling and totalizing | |||||||
| Multi-Gas &Multi-Range | N2 Eqv Full-scale Flow: Multi-0:10SCCM; Multi-1:30SCCM; Multi-2:100SCCM; Multi-3:300SCCM; Multi-4:1000SCCM; Multi-5:3SLM; Multi-6:5SLM; Multi-7:10SLM; Multi-8:30SLM; Multi-9:50SLM |
|||||||
