鎧富科技

SERVICEDG-900 Series

DG-900 Series
產品訊息

DG-900 Series

特色:
▪ 傳輸速度 : 9.6KBaud-38.4KBaud
▪ 支持±15VDC或+24VDC供電使用
▪ 適用原廠指定RS485 ASCII通訊協議
▪ 可通用Modbus-RTU協議
▪ 配置兩個RJ11通訊接口,可實現多個MFC串聯使用
▪ 可通過Modbus或RS485控制軟件編輯設備地址和傳輸速度
▪ 單條總線可實現最多125台MFC鏈接
▪ 可配TFT集成控制面板,實現無工具獨立控制與配置設備
Model MC(M)-DG900 MC(M)-DG910 MC(M)-DG901 MC(M)-DG911 MC(M)-DG902/03 MC(M)-AN612/13
Performance
Full Scale Range(N2 Eqv) 2-5000SCCM 5SLM-50SLM 02:30SLM-300SLM
03:200SLM-500SLM
02:30SLM-300SLM
03:200SLM-500SLM
Control Range Single Gas: 2-100% F.S.①      MGMR: 5-100% F.S.
Response Time ≤ 1.0sec to within ±1% F.S. ≤ 3.0sec to within ±2% F.S.
Accuracy ≤ ±1% S.P.(25%-100% of Full Scale)
 ≤ ±0.25% F.S.(2%-25% of Full Scale)
≤ ±2% S.P.(25%-100% of Full Scale)
≤ ±0.5% F.S.(2%-25% of Full Scale))
Linearity ≤ ±0.5% F.S. ≤ ±1% F.S.
Repeatability ≤ ±0.2% F.S.
Operating Differential Pressure 0.05-0.28 Mpa② 0.07-0.28 Mpa(5SLM-23SLM)
0.14-0.28 Mpa(23SLM-50SLM)
0.15-0.30 Mpa(30SLM-200SLM)
0.20-0.30 Mpa(200SLM-500SLM)
Maximum Operating Pressure 0.48 Mpa
Proof Pressure Max 1.03 Mpa
Leak Integrity Viton: Max 1x10-7Pa.m3/sec(He)        Metal:Max 1x10-11Pa.m3/sec(He)
Operation Temperature 5-45 DegC
Mechanical Parts
Control Valve Normally Closed(MFC)
Seal Viton Metal Viton Metal Viton Metal
Material Stainless Steel 316L,PTFE
Fitting 1/4" VCR or 1/4" Swagelok Compatible
3/8" VCR or 3/8" Swagelok Compatible
1/2" VCR or 1/2" Swagelok Compatible
Mounting Posture Any Position
Weight 0.9kg 1.0kg 0.9kg 1.2kg 2.2kg 2.3kg
Surface Finish ≤5RA TC,≤5RA ≤5RA TC,≤5RA ≤5RA TC,≤5RA
Electrical Configuration
Electrical Signal 0-5VDC: 9P-DSub *1
RS485: RJ11 *2
Power Supply +15VDC ±2% at 50mA
-15VDC ±2% at 250mA maximum
﹢24VDC±15% at 240mA maximum
Power Consumption 3.5W 4.5W
Option
Integrated Control Panel With OLED screen, Flow rate reading, controlling and totalizing
Multi-Gas &Multi-Range N2 Eqv Full-scale Flow:  Multi-0:10SCCM; Multi-1:30SCCM; Multi-2:100SCCM; Multi-3:300SCCM; Multi-4:1000SCCM;
Multi-5:3SLM; Multi-6:5SLM; Multi-7:10SLM; Multi-8:30SLM; Multi-9:50SLM